SiH4 Sensor

Silane is a group of silane organic compounds, including methyl silane (SiH4), ethyl silane (Si2H6) and some isomeric or higher alkanes.One of the most commonly used is methylsilane, so commonly referred to as nail silane. This is a colorless, pungent smell at room temperature, high risk flammable and explosive gas.Because it can produce high purity silicon and silicon-containing compounds, it is now widely used in semiconductor and microelectronic film making, and extended to the fields of steel, machinery, chemical industry and optics, etc., which consumes a large amount of silane every year.

The silane gas sensor USES electrochemical detection principle.The sensor contains a pair of electrodes and forms a battery element. When the measured gas reaches the corresponding reactive electrode (induction electrode), a chemical reaction occurs and an internal current is formed.The gas concentration can be obtained by measuring the current which is proportional to the measured gas concentration.In order to improve the measurement stability, a special reference electrode is added, which can stabilize the potential of the induction electrode together with the external voltage regulator circuit.In addition, the sensor expert network silane gas sensor adopts the design form of diffusion fence, which ensures that the gas entering the sensor can react with the sensor electrode and maintain the chemical activity of the electrode, making the sensor have good service life and temperature stability.