BAFS4000B mass gas flow sensor
BAFS4000B mass gas flow sensor is made of micro-electro-mechanical system (MEMS) flow sensor chip, which is suitable for clean and relatively dry gas measurement of various uses, realizing the digitalization, intelligence and high security of the equipment, and has the role and improvement of traditional industry innovation. Wide range of flow measurement range to meet the flow measurement needs of different equipment in the industry, high sensitivity, high reliability, high stability and low cost performance characteristics can promote the industry to energy saving and intelligent direction development.
BAFS4000 series products are based on MEMS traffic sensing unit, high precision digital processing and calibration circuit (MCU) composition, integrated high-resolution Delta-σ A/D converter and have internal calibration function Qun circuit and MCU processor together to ensure that the sensor signal real-time effective acquisition, obtain accurate traffic signal, And the corresponding compensation algorithm is processed internally, so there is no need to do any external calibration compensation, can ensure high precision flow output; Friendly digital output communication line, users can get corresponding data and information very easily; Product application range is very broad.
CHARACTERISTICS：
- The traffic ranges from 0SLPM to 300SLPM
- High accuracy (1.5% F.S accuracy)
- Linear output and temperature compensation
- Maintain long term stability with minimum zero drift
- Forward and reverse gas flow measurement
- Solid sensing core (no surface cavities or fragile film), resistant to clogging and pressure impact
- Analog output (1-5 V) (digital I2C communication output is available)
- Fast response time (20ms response time)
- The sensor is resistant to condensation
| Test conditions | VIN=12±0.01VDC，Ta=25°C | ||||
| Relative humidity | 40%<relative humidity<60% | ||||
| Temperature range | -25℃ ~+85℃ | ||||
| Storage temperature | -40℃ ~ 90℃ | ||||
| Humidity | 0~100％RH | ||||
| Impact resistant | 100g | ||||
| Analog voltage output (3) | 1~5VDC | ||||
| Supply voltage (5) | 8~18VDC | ||||
| Zero voltage | 0.95...1~1.05VDC | ||||
| Zero drift | 0.2%F.S | ||||
| Resolution (4) | 0.1%F.S | ||||
| Load | 100KΩ | ||||
| Precision | 1.5%F.S | ||||
| Response time | 20ms | ||||
| Supply current | 20~30mA | ||||
| Whole material | Silicon carbide, epoxy resin, polyphenylene sulfide, FR4, silicon as seal | ||||
| Flow range (1) | Unit (2) | Maximum flow rate (m/s) | |||
| BAFS4003BV | -12 ~12 | SLM | 0.527 | ||
| BAFS4004BV | -20 ~20 | SLM | 0.877 | ||
| BAFS4005BV | -35 ~35 | SLM | 1.535 | ||
| BAFS4100BV | -50 ~50 | SLM | 2.193 | ||
| BAFS4101BV | -100 ~100 | SLM | 4.387 | ||
| BAFS4102BV | -150 ~150 | SLM | 6.58 | ||
| BAFS4103BV | -200 ~200 | SLM | 8.773 | ||
| BAFS4104BV | -300 ~300 | SLM | 13.16 | ||
NOTE：
1. The range between 10SLM and 300SLM can be customized
2. SLM: standard litres per minute. Standard conditions: 0℃ and 1 atmosphere
3. 0~3V output is also available
4. including temperature drift and linear error
5. 5V power supply voltage can be selected
