High precision silicon resonant pressure sensor
Technical Overview:
The high precision pressure sensor adopts the advanced energy exchange mechanism and takes advantage of the good mechanical characteristics of single crystal silicon to convert the stress of the pressure into the natural frequency of the mechanical parts and output it. The sensor mainly uses the following technologies:
(1) The in situ temperature self-compensation technology based on double resonators effectively solves the problem of temperature drift of the sensor, and achieves the accuracy level of 0.01% FS in the whole temperature region;
(2) The whole temperature region amplitude stabilized closed-loop control technology effectively reduces the nonlinear error of the sensor. Combined with the temperature self-compensation technology, the sensor temperature region is effectively expanded and the wide temperature region accuracy is improved;
(3) The sensor adopts the wafer level vacuum packaging technology, which ensures the comprehensive performance of the sensor and effectively inhibits the time drift of the sensor.
Technical index:
| Technical index | PRS2511/2512 | RPS5611 | RPS2513 | MERPT-M1 |
| Operating temperature | -55~85℃ | -55~85℃ | -40~85℃ | -40~60℃ |
| Range | 2~110kPa，2~266kPa | 2~140kPa | 0~350kPa | 40~110kPa |
| Accuracy | ±0.01%FS | ±0.01%FS | ±0.01%FS | ±0.02kPa |
| Resolution | 0.005%FS | 0.005%FS | 0.005%FS | 2Pa |
| Overload | 2FS | 2FS | 2FS | 2FS |
| Reliability prediction | 3×105h | 3×105h | 3×105h | 3×105h |
| Power supply | （5±0.5）VDC | （5±0.5）VDC，13.5～16.5VDC | （5±0.5）VDC | （5±0.5）VDC |
Technical features:
The high precision silicon resonant pressure sensor based on the double resonator design has high comprehensive precision, high resolution, good stability, strong reliability, good temperature following, large temperature range and measuring range, small volume, low power consumption, low cost, and can be manufactured in mass.
Advanced degree:
Internationally advanced.
Technical status:
Small batch production, engineering application stage.
Scope of application:
(1) aero-atmospheric data system. The aero-atmospheric data system of military aircraft uses a high-precision pressure sensor with a comprehensive accuracy better than 0.02%FS, which is used to measure the altitude, speed, Angle of attack and other parameters of aircraft flight.
(2) Industrial control area. High precision pressure transducer is often used in the field of industrial control for measuring medium pressure or pressure reference, its typical products are digital pressure gauge, pressure controller and pressure calibrator.
(3) Meteorological field. As the core component of atmospheric pressure measurement, high precision atmospheric pressure sensor is widely used in national and local meteorological stations, climate stations, agricultural stations, etc.
